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Faceted grain boundaries in polycrystalline films

✍ Scribed by S. V. Bobylev; I. A. Ovid’ko

Book ID
110135851
Publisher
SP MAIK Nauka/Interperiodica
Year
2003
Tongue
English
Weight
74 KB
Volume
45
Category
Article
ISSN
1063-7834

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Faceting of twin grain boundaries in pol
Faceting of twin grain boundaries in polysilicon films
✍ Nakhodkin, Nikolay ;Kulish, Nikolay ;Rodionova, Tatyana 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 272 KB

## Abstract The faceting of grain boundaries (GB) under annealing in phosphorus‐doped polysilicon films, produced by low‐pressure chemical vapor deposition, has been investigated by transmission electron microscopy. It has been shown that the facet types and facet density depend on annealing temper