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Fabrication Process Comparison and Dynamics Evaluation of Electrothermal Actuators for a Prototype MEMS Safe and Arming Devices

✍ Scribed by S. A. Ostrow II, R. A. Lake, J. P. Lombardi III, R. A. Coutu Jr.…


Book ID
120791484
Publisher
Sage Publications
Year
2012
Tongue
English
Weight
721 KB
Volume
52
Category
Article
ISSN
0014-4851

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