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Fabrication, performance characteristics and gas analysis in a clean uhv system

✍ Scribed by KRG Sekhar; MA Murthy; Syed Azemuddin; S Mohan

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 251 KB
Volume: 40
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)90174-w

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