✦ LIBER ✦
Fabrication of x-ray zone plates with a minimum zone width smaller than 100nm by electron beam lithography
✍ Scribed by H. Aritome; K. Nagata; S. Namba
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 813 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0167-9317
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