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Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition

✍ Scribed by Golant, K. M. ;Lavrishchev, S. V. ;Popov, A. V. ;Artyukov, I. A. ;Feshchenko, R. M. ;Mitrofanov, A. N. ;Vinogradov, A. V.

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