Fabrication of ultra-thin-film SOI transistors using the recessed channel concept

✍ Scribed by L. Dreeskornfeld; J. Hartwich; F. Hofmann; J. Kretz; E. Landgraf; R.J. Luyken; W. Rösner; R. Schröter; T. Schulz; M. Specht; M. Städele; W. Weber; L. Risch

• Book ID: 108207400
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 266 KB
• Volume: 78-79
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.12.030