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Fabrication of two-dimensional photonic lattices in GaAs: the regular graphite structures

✍ Scribed by Y. Chen; G. Faini; H. Launois; J. Etrillard

Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 161 KB
Volume: 22
Category: Article
ISSN: 0749-6036
DOI: 10.1006/spmi.1996.0315

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✦ Synopsis

Two-dimensional photonic lattices have been fabricated in GaAs by using standard electron beam lithography and reactive ion etching techniques. In order to obtain absolute photonic band gaps at near-infrared frequencies, graphite structures which consist of parallel cylindrical rods of GaAs at the vertices of regular hexagons have been studied. Typically, for quarter micron diameter rods and half micron nearest spacing, an etching depth of more than one micron was obtained. Preliminary results from optical characterization are also presented.

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