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Fabrication of Two-Dimensional InGaN-Based Micro-LED Arrays

✍ Scribed by Jeon, C.-W. ;Kim, K.-S. ;Dawson, M.D.

Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
160 KB
Volume
192
Category
Article
ISSN
0031-8965

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✦ Synopsis

We have successfully fabricated two-dimensional InGaN-based 12 Γ‚ 12 micro-light emitting diode (LED) arrays with individually addressable emitters having diameters of 8 and 12 mm. A new planarisation scheme including gap-filling with plasma enhanced chemical vapour deposition (PECVD) SiO 2 and a chemical-mechanical polishing process was successfully developed for the electrical isolation of individual diodes. The uniformity of elements within an array was demonstrated through their electroluminescence and I-V characteristics.

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