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Fabrication of transparent conducting ATO films using the ATO sintered targets by pulsed laser deposition

โœ Scribed by Chen, Fei; Li, Na; Shen, Qiang; Wang, Chuanbin; Zhang, Lianmeng


Book ID
119368452
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
1005 KB
Volume
105
Category
Article
ISSN
0927-0248

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Ecological friendly -FeSi 2 thin film has been formed on FZ-Si (111) substrates using sintered FeSi 2 (purity 99.99%) and electrolytic Fe (purity 99.99%) targets by pulsed laser deposition (PLD) method in an ArF ( 193 nm) excimer laser. Subsequently the prepared thin films were annealed at 900 o C.