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Fabrication of Total-Dose-Radiation-Hardened (TDRH) SOI wafer with embedded silicon nanoclusters

✍ Scribed by Aimin Wu; Xi Wang; Xing Wei; Jing Chen; Ming Chen; Zhengxuan Zhang

Book ID: 103863288
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 314 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.01.074

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