✦ LIBER ✦
Fabrication of TiN-based three-terminal nano mechanical relays using nanoimprint technology
✍ Scribed by Y. J. Chang, D. Y. Liu, C. L. Kuo
- Book ID
- 120914839
- Publisher
- Springer-Verlag
- Year
- 2012
- Tongue
- English
- Weight
- 950 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0946-7076
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