✦ LIBER ✦
Fabrication of through-wafer via conductors in Si by laser photochemical processing : Daniel J. Ehrlich, Donald J. Silversmith, Robert W. Mountain and Jeff Tsao. IEEE Trans. Components Hybrids mfg Technol.CHMT-5 (4), 520 (1982)
- Book ID
- 103279062
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 81 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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