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Fabrication of three-dimensional microfluidic channels in glass by femtosecond pulses

✍ Scribed by Cunxia Li; Xu Shi; Jinhai Si; Tao Chen; Feng Chen; Aiqin Li; Xun Hou


Book ID
103874028
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
595 KB
Volume
282
Category
Article
ISSN
0030-4018

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## Abstract A method for high‐throughput 3D self‐assembly of 2D photopatterned microstructures using railed microfluidics is presented. Vertical device patterning of heterogeneous materials requires high‐level integration using conventional microelectromechanical system (MEMS) technology; however,