Fabrication of sub-20 nm structures in silicon nitride using CHF3/O2 rie

✍ Scribed by T.K.S. Wong; S.G. Ingram; D.E. Moore; A.N. Broers

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 305 KB
• Volume: 17
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(92)90109-5