✦ LIBER ✦
Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps
✍ Scribed by Agirregabiria, M.; Blanco, F. J.; Berganzo, J.; Arroyo, M. T.; Fullaondo, A.; Mayora, K.; Ruano-López, J. M.
- Book ID
- 118175130
- Publisher
- Royal Society of Chemistry
- Year
- 2005
- Tongue
- English
- Weight
- 633 KB
- Volume
- 5
- Category
- Article
- ISSN
- 1473-0197
- DOI
- 10.1039/b500519a
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