Fabrication of SMD 32.768 kHz tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators

✍ Scribed by S. Lee; J.-Y. Lee; T.-S. Park

• Book ID: 101384014
• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: German
• Weight: 107 KB
• Volume: 52
• Category: Article
• ISSN: 0947-5117
• DOI: 10.1002/1521-4176(200109)52:9<712::aid-maco712>3.0.co;2-g