Fabrication of size-controlled 10-nm scale Si pillars using metal clusters as formation nuclei

✍ Scribed by T. Tada; T. Kanayama; K. Koga; K. Seeger; S.J. Carroll; P. Weibel; R.E. Palmer

• Book ID: 114155851
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 241 KB
• Volume: 41-42
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(98)00126-9