Fabrication of size-controllable nanofluidic channels using angled physical vapor deposition

✍ Scribed by Li, Xiaojun; Wang, Xudi; Li, Xin; Jin, Jian; You, Hui; Qiu, Keqiang; Fu, Shaojun

• Book ID: 120287099
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 717 KB
• Volume: 98
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2012.07.029