Fabrication of Si/SiGe quantum point contacts by electron-beam lithography and shallow wet-chemical etching

✍ Scribed by U Wieser; U Kunze; K Ismail; J.O Chu

• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 99 KB
• Volume: 13
• Category: Article
• ISSN: 1386-9477
• DOI: 10.1016/s1386-9477(02)00299-0