✦ LIBER ✦
Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor
✍ Scribed by S. Chatzandroulis; A. Tserepi; D. Goustouridis; P. Normand; D. Tsoukalas
- Book ID
- 114155387
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 524 KB
- Volume
- 61-62
- Category
- Article
- ISSN
- 0167-9317
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