Fabrication of SiGe optical waveguides using VLSI processing techniques

✍ Scribed by Pearson, M.R.T.; Jessop, P.E.; Bruce, D.M.; Wallace, S.; Mascher, P.; Ojha, J.

• Book ID: 115370084
• Publisher: Optical Society of America
• Year: 2001
• Tongue: English
• Weight: 341 KB
• Volume: 19
• Category: Article
• ISSN: 0733-8724
• DOI: 10.1109/50.918889