Effect of fluorosurfactant on capillary
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Kyle J. Alvine; Yifu Ding; Jack F. Douglas; Hyun Wook Ro; Brian C. Okerberg; Ala
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Article
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2009
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John Wiley and Sons
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English
β 446 KB
## Abstract Surface forces play a paramount role in most aspects of Nanoimprint Lithography. In particular, subjecting nanoimprinted patterns to moderate heating allows surface tension to smooth out undesirable roughness and defects in the patterns, but this βthermal reflowβ treatment can induce st