Fabrication of polymer microstructures for MEMS: sacrificial layer micromolding and patterned substrate micromolding

✍ Scribed by Nicholas Ferrell; James Woodard; Derek Hansford

• Book ID: 106373356
• Publisher: Springer
• Year: 2007
• Tongue: English
• Weight: 401 KB
• Volume: 9
• Category: Article
• ISSN: 1387-2176
• DOI: 10.1007/s10544-007-9094-y