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Fabrication of planar optical phase elements

โœ Scribed by A.H. Firester; D.M. Hoffman; E.A. James; M.E. Heller

Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
253 KB
Volume
8
Category
Article
ISSN
0030-4018

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โœ Chien Chieh Lee; Yu Cheng Chang; Jenq Yang Chang; Chien Feng Chiu; Guo Chung Chi ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 505 KB

This paper presents a method for the fabrication of silicon-based optical elements in an SiN membrane. This x device will transmit visible and infrared light, and can be used for various types of optical elements, such as gratings, lenses, diffractive optical elements (DOEs), etc. This is a new desi