✦ LIBER ✦
Fabrication of Oxide TFTs with Al[sub 2]O[sub 3]/ZnO Gate Stacks Patterned Using a Dry Etching Method
✍ Scribed by Yoon, Sung-Min; Park, Sang-Hee Ko; Hwang, Chi-Sun; Chu, Hye Yong; Cho, Kyoung Ik
- Book ID
- 121341299
- Publisher
- The Electrochemical Society
- Year
- 2008
- Tongue
- English
- Weight
- 287 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1099-0062
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