Top-down processed silicon nanowire tran
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Vu, Xuan Thang ;Eschermann, Jan Felix ;Stockmann, Regina ;GhoshMoulick, Ranjita
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Article
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2009
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John Wiley and Sons
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English
β 645 KB
## Abstract We describe the fabrication, electrical and electrochemical characterization of silicon nanowire arrays, which were processed in a topβdown approach using combined nanoimprint lithography and wet chemical etching. We used the top silicon layer as contact line and observed an influence o