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Fabrication of organic electrochemical transistor arrays for biosensing

✍ Scribed by Zhang, Meng; Lin, Peng; Yang, Mo; Yan, Feng


Book ID
121801063
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
658 KB
Volume
1830
Category
Article
ISSN
0304-4165

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## Abstract We describe the fabrication, electrical and electrochemical characterization of silicon nanowire arrays, which were processed in a top‐down approach using combined nanoimprint lithography and wet chemical etching. We used the top silicon layer as contact line and observed an influence o