Fabrication of Narrow Lines by Shadow-Evaporated Lift-Off Masks

✍ Scribed by Weber, R. ;Krüger, U. ;Martienssen, W. ;Niemeyer, J.

• Book ID: 105383599
• Publisher: John Wiley and Sons
• Year: 1993
• Tongue: English
• Weight: 441 KB
• Volume: 136
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211360144