✦ LIBER ✦
Fabrication of nanometer-structures for photonic devices based on the negative tone resist AZPN114
✍ Scribed by C. Kaden; H. Gräbeldinger; H.-P. Gauggel; V. Hofsäβ; A. Hase; A. Menschig; H. Schweizer; R. Zengerle; H.J. Brückner
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 383 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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