✦ LIBER ✦
Fabrication of nanometer-scale side-gated silicon field effect transistors with an atomic force microscope
✍ Scribed by Campbell, P. M.; Snow, E. S.; McMarr, P. J.
- Book ID
- 121853654
- Publisher
- American Institute of Physics
- Year
- 1995
- Tongue
- English
- Weight
- 424 KB
- Volume
- 66
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.113210
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