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Fabrication of nano-structures on glass substrate by modified nano-imprint patterning with a plasma-induced surface-oxidized Cr mask

✍ Scribed by Lee, So Hee; Lee, Su Yeon; Lee, Seong Eui; Lee, Heon; Lee, Hee Chul


Book ID
125385158
Publisher
The Korean Institute of Metals and Materials
Year
2014
Tongue
English
Weight
766 KB
Volume
10
Category
Article
ISSN
1738-8090

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