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Fabrication of multilayer thin film filters by hydrofluoric acid bonding

✍ Scribed by L. Chen; H. Nishimura; K. Fukumi; J. Nishii; K. Hirao

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 591 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.10.066

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