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Fabrication of miniaturized Schottky emitter by wire electrical discharge machining (WEDM)

โœ Scribed by A.K. Dokania; M. Pelle; P. Kruit


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
417 KB
Volume
85
Category
Article
ISSN
0167-9317

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Cutting of polished single-crystal silic
โœ Hideo Takino; Toshimitsu Ichinohe; Katsunori Tanimoto; Syuichi Yamaguchi; Kazush ๐Ÿ“‚ Article ๐Ÿ“… 2004 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 302 KB

Smoothly polished single-crystal silicon plates were cut by wire electrical discharge machining (WEDM) in water and in oil in order to investigate the effect of WEDM on the polished surfaces. For cutting in water, polished surfaces near cut sections have chips and cracks, and are extremely rough; th