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Fabrication of microlens arrays based on the mass transport effect of SU-8 photoresist using a multiexposure two-beam interference technique

✍ Scribed by Wu, Cheng Yi ;Chiang, Ting Hsuan ;Lai, Ngoc Diep ;Do, Danh Bich ;Hsu, Chia Chen


Book ID
115354367
Publisher
The Optical Society
Year
2009
Tongue
English
Weight
826 KB
Volume
48
Category
Article
ISSN
1559-128X

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