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Fabrication of microfluidic devices using polydimethylsiloxane

โœ Scribed by Friend, James; Yeo, Leslie

Book ID
120198492
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
456 KB
Volume
4
Category
Article
ISSN
1932-1058

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## Abstract Using a single layer of SUโ€8 photoresist to fabricate optical waveguide cores and microfluidic channels on Pyrex glass is an ideal way to achieve photonic/microfluidic integration on a single chip. To address the problem of poor bonding, a thin nanoscale intermediate polymer layer was a