Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching

✍ Scribed by C. Hnatovsky; R.S. Taylor; E. Simova; P.P. Rajeev; D.M. Rayner; V.R. Bhardwaj; P.B. Corkum

• Publisher: Springer
• Year: 2006
• Tongue: English
• Weight: 864 KB
• Volume: 84
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-006-3590-4