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Fabrication of micro-gratings on Au–Cr thin film by femtosecond laser interference with different pulse durations

✍ Scribed by Xianhua Wang; Feng Chen; Hewei Liu; Weiwei Liang; Qing Yang; Jinhai Si; Xun Hou

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 453 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.06.057

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We report that one-dimensional (1D) and two-dimensional (2D) metal thin film gratings can be directly fabricated by interfering Nd-YAG pulsed laser beams (wavelength = 1064 nm, pulse width = 6 ns) incident from the backside of glass substrate. This process utilizes a laser-induced thermo-elastic for