Ion beam fabrication of metal/insulator/
Ion beam fabrication of metal/insulator/HT-superconductor nanostructures for field effect transistor
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V.M. Mikoushkin; V.V. Mamutin; S.E. Sysoev; V.V. Shnitov; Yu.S. Gordeev
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Article
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2003
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Elsevier Science
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English
β 194 KB
The paper suggests a new method of controllable fabrication of 'Metal / Insulator / Superconductor' (MIS) structures with nano-and subnanometer thicknesses of layers and interfaces. The method is based on ion-induced self-organizing restructuring near surface regions of high temperature superconduct