Fabrication of MEMS-based Micro-fluxgate Sensor with Runway-shaped Co-based Amorphous Alloy Core

✍ Scribed by Wu, Shaobin; Chen, Shi; Ouyang, Jun; Zuo, Chao; Yu, Lei; Yang, Xiaofei

• Book ID: 120567184
• Publisher: Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 835 KB
• Volume: 263
• Category: Article
• ISSN: 1742-6588
• DOI: 10.1088/1742-6596/263/1/012012