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Fabrication of MEMS actuators from the BEOL of a 0.25μm BiCMOS technology platform

✍ Scribed by Kulse, P.; Birkholz, M.; Ehwald, K.-E.; Bauer, J.; Drews, J.; Haak, U.; Höppner, W.; Katzer, J.; Schulz, K.; Wolansky, D.


Book ID
122000425
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
567 KB
Volume
97
Category
Article
ISSN
0167-9317

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