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Fabrication of low-loss optical-quality polymer waveguide facets in multilayer polymer devices using an inductively coupled plasma

✍ Scribed by Diffey, W.M.; Trimm, R.H.; Temmen, M.G.; Ashley, P.R.


Book ID
115371311
Publisher
Optical Society of America
Year
2005
Tongue
English
Weight
768 KB
Volume
23
Category
Article
ISSN
0733-8724

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