Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching

✍ Scribed by Maselli, Valeria; Osellame, Roberto; Cerullo, Giulio; Ramponi, Roberta; Laporta, Paolo; Magagnin, Luca; Cavallotti, Pietro Luigi

• Book ID: 120178358
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 434 KB
• Volume: 88
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2203335