Fabrication of LIGA masks for microfluidic analytical systems

✍ Scribed by B. G. Goldenberg; T. N. Goryachkovskaya; V. S. Eliseev; N. A. Kolchanov; V. I. Kondrat’ev; G. N. Kulipanov; V. M. Popik; S. E. Pel’tek; E. V. Petrova; V. F. Pindyurin

• Book ID: 110202956
• Publisher: Pleiades Publishing
• Year: 2008
• Tongue: English
• Weight: 256 KB
• Volume: 2
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/s1027451008040265