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Fabrication of LiCoO2 thin film cathodes for rechargeable lithium battery by electrostatic spray pyrolysis

✍ Scribed by C.H. Chen; A.A.J. Buysman; E.M. Kelder; J. Schoonman


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
439 KB
Volume
80
Category
Article
ISSN
0167-2738

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Thin films of lithium cobalt oxide were deposited on Pt or Pt/Ti/quartz glass substrates by radio frequency (RF) magnetron sputtering at the substrate temperatures from room temperature to 500 Β°C. As the substrate temperature increased, the film structure changed from amorphous structure to crystall