LiCoO2 cathode thin film fabricated by R
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Xianjun Zhu; Zaiping Guo; Guodong Du; Peng Zhang; Huakun Liu
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Article
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2010
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Elsevier Science
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English
β 410 KB
Thin films of lithium cobalt oxide were deposited on Pt or Pt/Ti/quartz glass substrates by radio frequency (RF) magnetron sputtering at the substrate temperatures from room temperature to 500 Β°C. As the substrate temperature increased, the film structure changed from amorphous structure to crystall