Fabrication of Large-Area Suspended MEMS Structures Using GaN-on-Si Platform

✍ Scribed by Jianan Lv; Zhenchuan Yang; Guizhen Yan; Wenkui Lin; Yong Cai; Baoshun Zhang; Chen, K.J.

• Book ID: 118144944
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 342 KB
• Volume: 30
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/led.2009.2028905