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Fabrication of high-aspect-ratio electrode array by combining UV-LIGA with micro electro-discharge machining

โœ Scribed by Yang-Yang Hu; D. Zhu; N. S. Qu; Y. B. Zeng; P. M. Ming


Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
469 KB
Volume
15
Category
Article
ISSN
0946-7076

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