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Fabrication of Ge nanoneedles by ion-irradiation method

โœ Scribed by Ako Miyawaki; M. Zamri; T. Hayashi; Y. Hayashi; M. Tanemura; T. Tokunaga


Book ID
113919483
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
842 KB
Volume
206
Category
Article
ISSN
0257-8972

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Ge nanocrystals (NCs) grown by ion implantation in amorphous silica matrices were irradiated with 5 MeV Si ions over a different fluence range (2 ร‚ 10 11 -2 ร‚ 10 13 cm ร€2 ) than previously reported. Size and depth distributions as well as structural disorder in the NCs were measured by RBS, TEM, SAX