Fabrication of gas amplification microstructures with SU8 photosensitive epoxy

✍ Scribed by M.J Key; A Llobera; M Lozano; I Ramos-Lerate; V Seidemann

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 226 KB
• Volume: 525
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2004.03.023