Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding

✍ Scribed by Shao, P. E.; van Kan, A.; Wang, L. P.; Ansari, K.; Bettiol, A. A.; Watt, F.

• Book ID: 120734953
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 502 KB
• Volume: 88
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2181631