✦ LIBER ✦
Fabrication of damage free micropatterns in silicon : R. P. Gupta, P. R. Deshmukh, W. S. Khokle and Amarjit Singh. Microelectron. Reliab. 24 (4) 623 (1984)
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 256 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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