✦ LIBER ✦
Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
✍ Scribed by Hiroshi Tanaka, Hirotaka Hida, Kazuo Sato
- Book ID
- 120914869
- Publisher
- Springer-Verlag
- Year
- 2012
- Tongue
- English
- Weight
- 253 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0946-7076
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